Program Chair: 

Andrea Illiberi (ASM, Belgium)
 
Program Committee: 

Stacey Bent (Stanford University, USA)
Robert Clark (TEL, USA)
Annelies Delabie (IMEC, Belgium, ASD 2016 Chair)
John Ekerdt (University of Texas, USA)
Dennis Hausmann (Lam Research, USA)
Shashi Vyas (Intel, USA)
Erwin Kessels (Eindhoven University of Technology, NL)
Adrie Mackus (Eindhoven University of Technology, NL, ASD 2017 Chair)
Ravindra Kanjolia (EMD Performance Materials, USA)
Jan Willem Maes (ASM, Belgium)
Gregory Parsons (North Carolina State University, USA, ASD 2018 Chair)
Mark Saly (Applied Materials, USA)
Kavita Shah (Nova, USA)
Rami Hourani (Intel, USA)
Anuja DeSilva (IBM, USA)
 
Local Organizing Committee:

Hessel Sprey (ASM, Belgium)
Marleen Orband (IMEC)
Kathleen Vanderheyden (IMEC)